JPS63165750U - - Google Patents
Info
- Publication number
- JPS63165750U JPS63165750U JP5877587U JP5877587U JPS63165750U JP S63165750 U JPS63165750 U JP S63165750U JP 5877587 U JP5877587 U JP 5877587U JP 5877587 U JP5877587 U JP 5877587U JP S63165750 U JPS63165750 U JP S63165750U
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- electrode
- ion beam
- drawer
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987058775U JPH0353402Y2 (en]) | 1987-04-20 | 1987-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987058775U JPH0353402Y2 (en]) | 1987-04-20 | 1987-04-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63165750U true JPS63165750U (en]) | 1988-10-28 |
| JPH0353402Y2 JPH0353402Y2 (en]) | 1991-11-21 |
Family
ID=30889648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987058775U Expired JPH0353402Y2 (en]) | 1987-04-20 | 1987-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353402Y2 (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007523444A (ja) * | 2003-10-17 | 2007-08-16 | エフ・イ−・アイ・カンパニー | 帯電粒子抽出デバイスおよびその設計方法 |
| JP2016081753A (ja) * | 2014-10-17 | 2016-05-16 | 住友重機械イオンテクノロジー株式会社 | ビーム引出スリット構造及びイオン源 |
| JP2024532936A (ja) * | 2021-09-13 | 2024-09-10 | アプライド マテリアルズ インコーポレイテッド | 可変厚さイオン源抽出プレート |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6076838B2 (ja) | 2013-05-31 | 2017-02-08 | 住友重機械イオンテクノロジー株式会社 | 絶縁構造及び絶縁方法 |
-
1987
- 1987-04-20 JP JP1987058775U patent/JPH0353402Y2/ja not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| PROCEEDINGS OF THE INTERNATIONAL ION ENGINEERING CONGRESS=1983 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007523444A (ja) * | 2003-10-17 | 2007-08-16 | エフ・イ−・アイ・カンパニー | 帯電粒子抽出デバイスおよびその設計方法 |
| JP2016081753A (ja) * | 2014-10-17 | 2016-05-16 | 住友重機械イオンテクノロジー株式会社 | ビーム引出スリット構造及びイオン源 |
| JP2024532936A (ja) * | 2021-09-13 | 2024-09-10 | アプライド マテリアルズ インコーポレイテッド | 可変厚さイオン源抽出プレート |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0353402Y2 (en]) | 1991-11-21 |